Maria Valve
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This high-precision needle valve is compatible with a wide range of gases including: Nitrogen, Oxygen, Argon, Helium (He), Hydrogen, Carbon Dioxide, Neon (Ne), Krypton (Kr), Xenon (Xe), Ammonia, Nitrous Oxide, Silane, Dichlorosilane, Silicon Tetrachloride, Diborane, Boron Trifluoride, Phosphine, Arsine, Nitrogen Trifluoride, Sulfur Hexafluoride, Hydrogen Chloride, Carbon Tetrafluoride, and Trimethylaluminum.
Professional high-purity gas 316L needle valves designed for new and high-tech applications, ensuring precision flow regulation and zero leakage.
| Parameter | Description |
|---|---|
| Material | ASTM A182 F316L (low-carbon stainless steel). Electropolished (Ra ≤ 0.2μm) to minimize particle retention. |
| Purity Level | Meets semiconductor standards: THC ≤ 1 ppb, Moisture ≤ 1 ppb, Particulates (≥ 0.2μm) ≤ 1/100 mL. |
| Design Features | Straight-through or angle pattern. Precision-machined needle tip. Soft-seal (PTFE/Vespel®) or metal-to-metal seal. Bubble-tight stem seal. |
| Operating Conditions | Pressure: Vacuum to 6000 psi (413 bar). Temperature: -40°C to 150°C (PTFE); up to 450°C (Metal). Flow control ratio ≥ 100:1. |
| Industry Standards | ASME B16.34, ISO 14644-1, NACE MR0175, USP Class VI. |
| Testing | Helium mass spectrometer leak test: ≤ 1×10⁻⁹ atm·cc/s. Cleanroom-washed (ISO Class 5). |
A1: This valve is rated for high-pressure applications up to 6000 psi (413 bar).
A2: Yes, it is made from 316L stainless steel with electropolished surfaces (Ra ≤ 0.2μm) and certified cleanroom washing to meet semiconductor industry standards.
A3: We offer multiple connection options including NPT threaded ports and VCR face seal fittings, with sizes ranging from 1/4 inch to 1 inch.
A4: Yes, the 316L material provides excellent corrosion resistance. For extremely aggressive gases, special coatings or exotic alloys are available upon request.
A5: Standard PTFE seals are rated for -40°C to 150°C. For extreme heat, metal-to-metal seals can handle temperatures up to 450°C.
A6: Every valve undergoes a Helium mass spectrometer leak test with a rating of ≤ 1×10⁻⁹ atm·cc/s to ensure bubble-tight performance.
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